SmScO3 thin films as an alternative gate dielectric
نویسندگان
چکیده
منابع مشابه
Characterization of lanthanum lutetium oxide thin films grown by atomic layer deposition as an alternative gate dielectric
Available online 17 August 2008 LaLuO3 thin films have bee
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2008
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.2968660